Russia begins development of its own EUV lithography tool to compete with ASML

'EUV exposure equipment' is an essential tool for manufacturing cutting-edge semiconductors, and Dutch company ASML holds a large share of the market. Russia has now created a plan to develop its own EUV exposure equipment that is not dependent on ASML. The plan envisions the development of an EUV exposure equipment with a different mechanism than ASML, and it seems that a complete replacement of semiconductor manufacturing tools other than the equipment will also be necessary.

В России написана «дорожная карта» создания суверенного литографа дешевле и проще, чем у ASML - CNews
https://www.cnews.ru/news/top/2024-12-13_v_rossii_razrabotali_dorozhnuyu

Russia plans EUV chipmaking tools that it says will be cheaper and easier to build than ASML's — country outlines new roadmap to smaller chips | Tom's Hardware
https://www.tomshardware.com/tech-industry/russia-plans-euv-chipmaking-tools-that-it-says-will-be-cheaper-and-easier-to-build-than-asmls-country-outlines-new-roadmap-to-smaller-chips

ASML's EUV lithography tool can emit ultraviolet light with a very short wavelength of 13.5 nm, while Russia aims to work with even shorter wavelengths of ultraviolet light, at 11.2 nm, which is expected to reduce manufacturing and operational costs.

The EUV exposure tool development plan is divided into three stages: Stage 1: Basic research and identification of necessary technologies; Stage 2: Creation of a prototype capable of processing 60 200mm wafers per hour; Stage 3: Creation of a mass-production model capable of processing 60 300mm wafers per hour.

In the field of advanced semiconductors, design tools and various peripheral equipment are built to match ASML's 13.5 nm wavelength. For this reason, in order to manufacture semiconductors using Russia's '11.2 nm wavelength EUV exposure tool,' the entire manufacturing ecosystem will need to be revamped. Russia has not specified how long it will take to develop an EUV exposure tool, but overseas media Tom's Hardware points out that 'considering the need to revamp the ecosystem, it will take several years to 10 years.'

China is also working to 'build a semiconductor manufacturing ecosystem that is not dependent on ASML and other companies,' and in April 2024, the Chinese government invested over 7 trillion yen in the semiconductor industry.

China invests more than 7 trillion yen to promote domestic semiconductor industry - GIGAZINE